Microelectromechanical Systems Publications

Publications in Microelectromechanical Systems

Explore the most influential research papers and scholarly works that have shaped Microelectromechanical Systems. Use the concept filter below to focus on a specific sub-area of research.

Microelectromechanical Systems

4.7K

Publications

226.8K

Citations

Showing yearly statistics from 2000-2026.

Page 1

	Year	Citations
Silicon as a mechanical material K. Petersen Proceedings of the IEEE MiniaturizationEngineeringMicromechanicsSingle-crystal SiliconMechanical Engineering	1982	2.9K
Wireless Body Area Networks: A Survey Samaneh Movassaghi, Mehran Abolhasan, Justin Lipman, IEEE Communications Surveys & Tutorials Human BodyWearable SystemPersonal Health MonitoringMedical ElectronicsEngineering	2014	1.5K
Nanoelectromechanical systems K. L. Ekinci, M. L. Roukes Review of Scientific Instruments NanosensorsEngineeringMicroelectromechanical SystemsMicroactuatorOptomechanics	2005	1.3K
The Fluid Mechanics of Microdevices—The Freeman Scholar Lecture Mohamed Gad‐el‐Hak Journal of Fluids Engineering EngineeringFlow ControlFluid MechanicsMechanical EngineeringMicroelectromechanical Systems	1999	1.3K
MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) AND FLUID FLOWS Chih‐Ming Ho, Yu‐Chong Tai Annual Review of Fluid Mechanics Micromachining TechnologyEngineeringFlow ControlMechanical ControlMicrofabrication	1998	1.2K
Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems Kimberly Cook-Chennault, Nithya Thambi, Anjali Sastry Smart Materials and Structures EngineeringEnergy EfficiencyEnergy ConversionMicroelectromechanical SystemsPower Electronic Systems	2008	1.2K
Cantilever transducers as a platform for chemical and biological sensors Nickolay V. Lavrik, Michael J. Sepaniak, Panos G. Datskos Review of Scientific Instruments EngineeringMechanical EngineeringMicroelectromechanical SystemsBiomedical EngineeringMicroactuator	2004	1.1K
Zeptogram-Scale Nanomechanical Mass Sensing Ya‐Tang Yang, Carlo Callegari, Philip X.‐L. Feng, Nano Letters EngineeringMicroscopyMechanical EngineeringMicroelectromechanical SystemsHigh Frequency	2006	1K
Electrowetting-based actuation of droplets for integrated microfluidicsElectronic supplementary information (ESI) available: six videos showing droplet flow, droplet dispensing and electrowetting. See http://www.rsc.org/suppdata/lc/b1/b110474h/ Michael Pollack, Alexander D. Shenderov, Richard B. Fair Lab on a Chip Droplet SizeMicrofluidics-based InstrumentationElectrohydrodynamicsEngineeringFlexible Electronics	2002	985
Review: Semiconductor Piezoresistance for Microsystems A.A. Barlian, Woo‐Tae Park, Joseph R. Mallon, Proceedings of the IEEE EngineeringMechanical EngineeringMicroelectromechanical SystemsBell LaboratoriesIntegrated Piezoresistor Technology	2009	915
Giant Tunneling Piezoresistance of Composite Elastomers with Interlocked Microdome Arrays for Ultrasensitive and Multimodal Electronic Skins Jonghwa Park, Youngoh Lee, Jaehyung Hong, ACS Nano EngineeringElectronic SkinMechanical EngineeringWearable TechnologyLiquid Crystalline Elastomer	2014	878
Microelectromechanical systems (MEMS): fabrication, design and applications Jack W. Judy Smart Materials and Structures EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroactuatorMicro-electromechanical System	2001	803

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